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・ micro$oft
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microelectromechanical system
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microelectromechanical system : FOLDOC
microelectromechanical system
(MEMS) The integration of mechanical structures (moving parts) with microelectronics. MEMS devices are "custom" designed for a purpose which requires a mechanical action to be controlled by a computer.
Applications include sensors, medical devices, process controls.
{(http://mems.mcnc.org/)}.
See also nanotechnology.
(1999-03-25)



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